Power consumption is forecast by the International Technology Roadmap of Semiconductors
(ITRS) to pose long-term technical challenges for the semiconductor industry. The purpose of
this paper is threefold: (1) to provide an overview of strategies for powering MEMS via
non-regenerative and regenerative power supplies; (2) to review the fundamentals of
piezoelectric energy harvesting, along with recent advancements, and (3) to discuss future
trends and applications for piezoelectric energy harvesting technology. The paper concludes
with a discussion of research needs that are critical for the enhancement of piezoelectric energy
harvesting devices