The RBS data provide a depth profile of the copper distributions in our films. Since the backscattered ion counts are collected from a 1-2mm diameter area, the data are representative of averages over the order of 100,000 grains or more.
The RBS data provide a depth profile of the copper distributions in our films. Sincethe backscattered ion counts are collected from a 1-2mm diameter area, the data arerepresentative of averages over the order of 100,000 grains or more.