The SIMS line scans were performed with a step of 1 μm, and the obtained 18O diffusion profiles were evaluated by fitting them to the solution of the diffusion equation in a semi-infinite medium which is given below
The SIMS line scans were performed with a step of 1 μm, and theobtained 18O diffusion profiles were evaluated by fitting them to the solution of the diffusion equation in a semi-infinite medium which isgiven below