Figure 3. Using self-assembly of SiO2 nanoparticles as a mask and reactive ion etching (RIE) method to fabricate the
improved bio-inspired Moth eye nano structures on the scintillator materials Lu2SiO5:Ce thin film. (a) The self-assembly of
SiO2 nanoparticles on the top of high index light extraction layer Si3N4, which is deposited on Lu2SiO5:Ce thin film.
(b) The SEM image of the improved bio-inspired Moth eye nano structures with certain degree roughness on the sidewall,
which shows interesting nano-on-nano features.