Purpose:
in the diffusion process, POCI, is decomposed under high temperature
and generate phosphorus. Then, The phosphorus diffused on the
P-type substrate to form a PN junction. A negative concertration
gradient and proper phosphorus content are desired for homogeneous
sheet resistance and eletrode ohm contact. The concentration of the
phosphorou source, diffusion temperature and diffusion time are
are the main varibles in this proess
"Definition of diffusion:
"
Micro definition: The movement of micro particles(atoms, ions,
molecule) because of thermal motion.
Purpose:in the diffusion process, POCI, is decomposed under high temperatureand generate phosphorus. Then, The phosphorus diffused on theP-type substrate to form a PN junction. A negative concertrationgradient and proper phosphorus content are desired for homogeneoussheet resistance and eletrode ohm contact. The concentration of thephosphorou source, diffusion temperature and diffusion time areare the main varibles in this proess"Definition of diffusion:"Micro definition: The movement of micro particles(atoms, ions, molecule) because of thermal motion.
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