An alternative in-situ approach for modifying the ZnO surface
morphology is introduced in this publication. A surface treatment
based only on diborane and water is shown to be able to influence
the growth of ZnO crystallites: a regular repetition of such treatment during the growth of a ZnO layer allows to prepare a nominally flat LPCVD ZnO material later referred as nanocrystalline ZnO (NC-ZnO).