The elements added diamond-like carbon films (hydrogen, fluorine, and sulfur) fabricated from C2H2:H2,
C2H2:CF4 and C2H2:SF6 mixtures were used to compare and study the effects of element contents on the
deposition and tribological properties of films prepared by plasma-based ion implantation (PBII). The
structure of the films was analyzed by Raman spectroscopy. Hardness and elastic modulus of films were
measured by nano-indentation hardness testing. Contact angle and surface energy of films were measured by
contact angle measurement. Tribological characteristics of films were performed using a ball-on-disk friction
tester. The results indicate that with the increasing element contents, the hardness and elastic modulus, and
surface energy of all films decreases, while the surface angle tends to increase. Additionally, H-DLC films at C:H
flow rate ratio of 1:4 shows a friction coefficient of 0.08 under ambient air, which are considerable improvement
in the tribological properties. This is due to the formation of a transfer films on the interface and
high hydrogen contents. For F-DLC films and S-DLC films, does not show a significant decrease in the friction
coefficient with the fluorine and sulfur contents under ambient air. The decrease in the friction coefficient is
greater under high vacuum than under ambient air.