At low pressure (1.3 Pa) and 20W RF power, the ion energy and ion flux were about 23 eV (Te4:5 eV) and 0.61015m3 for argon gas discharge, respectively [13].
At low pressure (1.3 Pa) and 20W RF power,the ion energy and ion flux were about 23 eV(Te4:5 eV) and 0.61015m3 for argon gasdischarge, respectively [13].