Introduction .............................................................................................................................. 1
Scope of this guide ........................................................................................................... 2
Introduction to coherence scanning interferometers ........................................................ 3
Basics of interferometry ..................................................................................... 3
Coherence scanning interferometry ................................................................... 5
Interferometer objective lenses .......................................................................... 8
Terms and definitions............................................................................................................11
General terms used in this guide .................................................................................... 12 Surface profile measurement............................................................................ 12 Areal surface texture measurement .................................................................. 12 Sampling area...................................................................................................12 Coherence scanning interferometry ................................................................. 13 Numerical aperture...........................................................................................13 User defined variables......................................................................................14 Smooth surface.................................................................................................14
Areal surface texture parameters .................................................................................... 14 Areal and profile parameters ............................................................................ 15 Amplitude parameters ...................................................................................... 16 Spacing parameters .......................................................................................... 19 Hybrid parameters ............................................................................................ 20
Filtering techniques ........................................................................................................ 21 Scale-limited surfaces ...................................................................................... 21