Emission of gaseous pollutants such

Emission of gaseous pollutants such as the VOCs in air or NOx in the flue gas by
human activities is a large global environmental problem. A few years ago,
chlorofluorocarbons, such as CFC-113, was found to cause the ozone depletion layer in
the stratosphere and was stopped to use. The recovery ofthe CFCs must be done from
the air conditioner, the refrigerator etc. At that process, small amount of CFCs
evaporates and is contaminated in air. The decomposition of dense CFC need much
energy because ofthat excellent chemical stability. Yamamoto et al first reported the
decomposition of CFC-I13 and other VOCs by a pulsed plasma (PPCP) reactor or a
packed-bed plasma reactor. The pulse reactor could decompose only 60 % of 1,000
ppm CFC-II3 but the packed-bed could not at that time. 1) The authors proposed the
decomposition of dilute CFCs by using Non-Thermal Plasma Processing in SPCP
(Surface Discharge Induced Plasma for Chemical Processing" mode and good
decomposition rate of more than 99% was realized." Decomposition of other VOCs
such astrichloroethylene, acetone and others were also well-decomposed." Various
reactors such as a SPCP reactor with a stripe discharge electrode (ceramic), a coil
discharge electrode type (quartz tube) and a coaxial center electrode' type barrier
discharge reactors were compared each other and residual byproducts were reported. 5)
Some extended results will be presented in this paper.
On the other hand, high energy electron processing by the electron beam irradiation"
or pulse discharge'r" were reported to be effective in reducing NOx in the flue gas.
Some additives, especially, NH3are well-known to enhance NOx removal performance
of the plasma processing. Recently, Shimizu et at>, Vogtlin et altO) and Souma'!