In addition to the resistive method

In addition to the resistive method, the capacitive measurement principle, above all, established and proved itself as a standard in the past. For this principle, the sensor element is built out of a capacitor. The dielectric is a polymer which absorbs or releases water proportional to the relative environmental humidity, and thus changes the capacitance of the capacitor. This change in capacitance can be measured by an electronic circuit. This allows the relative air humidity to be determined. For humidity sensors with CMOSens® technology, a "micro-machined" finger electrode system with different protective and polymer cover layers forms the capacitance for the sensor chip, and, in addition to providing the sensor property, simultaneously protects the sensor from interference in ways previously not achieved.